Solid State Laser Annealing, Crystallization,
Dopant Activation and Lift-Off
INNOVAVENT – Laser-Optics-Systems
for crystallization, annealing and doping applications of semiconductors are of modular design and are developed in close cooperation with users and system integrators. The products range from low-budget optical systems to create a line focus up to complex laser optical subsystems including laser, homogenizing optics, imaging p-lens and beam diagnostics.
LCD and OLED displays take advantage of the
thin film transistor performance
to switch the display pixel matrix. Driver electronics, memory and CPU circuits can be directly produced
on the glass substrate. Thin silicon films are transferred into the liquid phase and controlled
solidification results in homogenous crystallization providing high electron/hole mobility.
Laser Lift-Off processes
have been investigated since more than a decade.
A typical example of industrial applications can be found in the LED industry for separating
light-emitting films like GaN from sapphire substrates where they are
grown by vapor deposition processes.